An overview of curvilinear OPC algorithms for silicon photonics applications
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An overview of curvilinear OPC algorithms for silicon photonics applications
Driving the silicon photonics technology along the journey of early development towards high volume manufacturing passes through multiple challenging stages. In this presentation I will be focusing on the challenges facing both optical proximity correction (OPC) and etch compensation for silicon photonics designs versus conventional CMOS designs.
Apr 10, 2024
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